Co-implantation with microwave annealing for phosphorous shallow-junction formation in Germanium

Author

Liu, J.B. ; Luo, JianChao ; Li, J.F. ; Chen, Ci ; Wang, G.L. ; Chen, T. ; Li, T.T. ; Zhong, Jin ; Wu, D.P. ; Xu, Peng ; Zhao, Chen

Author_Institution

Key Lab. of Microelectron. Devices & Integrated Technol., Inst. of Microelectron., Beijing, China

fYear

2014

fDate

June 26 2014-July 4 2014

Firstpage

1

Lastpage

4

Abstract

The formation of N-type Ge shallow junction is investigated in this work. By combining carbon co-implantation and microwave annealing (MWA) method, the junction depth of 34 nm measured by secondary ion mass spectroscopy (SIMS) as well as sheet resistance of 467 ohm/sq measured by Hall is achieved. Results show that the opitimal carbon implantation energy is 8 keV in that distributed carbon ions at such an energy can effectively trap vacancies and phosphorous into immobile clusters. The recrystallization of amorphous layer after MWA annealing is also studied by both ellipsometry and transmission electron microscopy (TEM).

Keywords

annealing; carbon; elemental semiconductors; germanium; ion implantation; microwave materials processing; phosphorus; recrystallisation; secondary ion mass spectra; semiconductor junctions; C; Ge; MWA method; P; SIMS; TEM; amorphous layer recrystallization; carbon co-implantation; depth 34 nm; distributed carbon ions; electron volt energy 8 keV; ellipsometry; immobile clusters; microwave annealing; n-type germanium shallow junction; optimal carbon implantation energy; phosphorous shallow-junction formation; secondary ion mass spectroscopy; sheet resistance; transmission electron microscopy; trap vacancies; Carbon; Electrical resistance measurement; Germanium; Junctions; Microelectronics; Rapid thermal annealing; carbon; co-implantation; microwave annealing;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology (IIT), 2014 20th International Conference on

Conference_Location

Portland, OR

Type

conf

DOI

10.1109/IIT.2014.6939956

Filename

6939956