Irradiation effects of fragment ions of tetradecane on glass surfaces

Vapors of tetradecane (C₁₄H₃₀) were ionized by electron bombardment. The generated fragment ions such as C₃H₇, C₆H₁₃, and C₁₂H₂₅ ions were separated and accelerated towards glass substrates. The acceleration voltage was adjusted between 1.5 kV and 9 kV. The fluence was 4.0 × 10¹⁶carbon atoms/cm². Thin films were deposited on the glass substrates by C₃H₇- and C₆H₁₃-ion irradiation at an incident energy of 0.42 keV per carbon. Raman spectra measurements showed that DLC films were formed by C₃H₇- and C₆H₁₃-ion irradiation with the film thickness being larger in case of C₃H₇. On the contrary, for C₁₂H₂₅-ion irradiation, the glass substrate surface was sputtered at an incident energy of 0.42 keV per carbon. Chemical sputtering occurred by surface reactions of hydrogen and carbon with silicon and oxygen atoms. In addition, the surface characteristics of glass substrates irradiated by C₃H₇, C₆H₁₃ and C₁₂H₂₅ ions were investigated.