• DocumentCode
    1361804
  • Title

    Frequency Effect on Voltage Linearity of \\hbox {ZrO}_{2} -Based RF Metal–Insulator–Metal Capacitors

  • Author

    Bertaud, Thomas ; Blonkowski, Serge ; Bermond, Cedric ; Vallee, Christophe ; Gonon, Patrice ; Gros-Jean, Michael ; Flechet, Bernard

  • Author_Institution
    IMEP-LAHC, Univ. de Savoie, Le Bourget du Lac, France
  • Volume
    31
  • Issue
    2
  • fYear
    2010
  • Firstpage
    114
  • Lastpage
    116
  • Abstract
    This letter deals with the electrical and wideband frequency characterizations of metal-insulator-metal capacitors integrating medium-?? material, ZrO2. In particular, this letter focuses on the frequency effect on the voltage linearity of these capacitors and material. The dependence of the voltage-capacitance coefficient (VCC) ?? is, for the first time, studied from 1 kHz to 1 GHz. Intrinsic or extrinsic material origin of the VCC are discussed.
  • Keywords
    MIM devices; capacitors; high-k dielectric thin films; zirconium compounds; RF metal-insulator-metal capacitors; electrical frequency characterizations; frequency 1 kHz to 1 GHz; frequency effect; medium-?? material; voltage linearity; voltage-capacitance coefficient; wideband frequency characterizations; Dielectric materials; metal–insulator–metal (MIM) devices; microwave measurement; zirconium;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2036275
  • Filename
    5357397
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1361804