DocumentCode :
1361965
Title :
Solid state: Silicon sensors meet integrated circuits: The combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile
Author :
Barth, P.W.
Author_Institution :
Stanford Univ., Stanford, CA, USA
Volume :
18
Issue :
9
fYear :
1981
Firstpage :
33
Lastpage :
39
Abstract :
Describes the combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile.
Keywords :
monolithic integrated circuits; transducers; Si; circuit technology; integrated circuits; monolithic; sensing; sensors; transducers; Bonding; Glass; Laboratories; Sensors; Silicon; Surface treatment;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1981.6369810
Filename :
6369810
Link To Document :
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