Title :
Solid state: Silicon sensors meet integrated circuits: The combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
Describes the combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile.
Keywords :
monolithic integrated circuits; transducers; Si; circuit technology; integrated circuits; monolithic; sensing; sensors; transducers; Bonding; Glass; Laboratories; Sensors; Silicon; Surface treatment;
Journal_Title :
Spectrum, IEEE
DOI :
10.1109/MSPEC.1981.6369810
