Fiber ribbon alignment structures based on rhombus-shaped channels in silicon

Author

Hoffmann, M. ; Dickhut, S. ; Voges, E.

Author_Institution

Lehrstuhl fur Hochfrequenztech., Dortmund Univ., Germany

Volume

12

Issue

7

fYear

2000

fDate

7/1/2000 12:00:00 AM

Firstpage

828

Lastpage

830

Abstract

A fiber ribbon alignment structure based on bulk silicon micromachining technique with precise rhombus-shaped channels in {100}-silicon is demonstrated. The main advantages are totally buried and thereby protected fibers and a less structured wafer surface suitable for the integration of components on top. The presented structure allows a simplified assembly of fiber ribbon arrays due to integrated funnels for fiber insertion. The accuracy of the channels within an array was found to be /spl plusmn/0.2 μm. Furthermore, this technique allows combining fiber ribbons with a pitch of 250 μm with photodiodes for system monitoring in a single fiber pigtail.

Keywords

integrated optics; micro-optics; micromachining; monitoring; optical arrays; optical communication equipment; optical fibre couplers; photodiodes; silicon; 250 mum; Si; bulk silicon micromachining technique; fiber insertion; fiber ribbon alignment structures; fiber ribbon arrays; fiber ribbons; integrated funnels; less structured wafer surface; photodiodes; precise rhombus-shaped channels; rhombus-shaped channels; silicon; single fiber pigtail; system monitoring; {100}-silicon; Anisotropic magnetoresistance; Arrayed waveguide gratings; Assembly; Etching; Micromachining; Optical fiber devices; Optical fibers; Optical surface waves; Protection; Silicon;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.853514

Filename

853514