A ZnO Nanostructure-Based Quartz Crystal Microbalance Device for Biochemical Sensing

We report a ZnO-nanostructure-based quartz crystal microbalance (nano-QCM) device for biosensing applications. ZnO nanotips are directly grown on the sensing area of a conventional QCM by metalorganic chemical vapor deposition (MOCVD). Scanning electron microscopy (SEM) shows that the ZnO nanotips are dense and uniformly aligned along the normal to the substrate surface. By using superhydrophilic nano-ZnO surface, more than tenfold increase in mass loading sensitivity of the nano-QCM device is achieved over the conventional QCM. The ZnO nanotip arrays on the nano-QCM are functionalized. The selective immobilization and hybridization of DNA oligonucleotide molecules are confirmed by fluorescence microscopy of the nano-QCM sensing areas.