DocumentCode :
1362662
Title :
Best bits: Applications of microprocessors: Outguessing gases
Volume :
20
Issue :
7
fYear :
1983
fDate :
7/1/1983 12:00:00 AM
Firstpage :
26
Lastpage :
28
Abstract :
In semiconductor fabrication, processes such as chemical vapor deposition require a control panel to coordinate gas flow into and out of the chamber where chips are kept. Engineers must monitor the pressure of the chamber continually and manipulate theexchange of dangerous gases carefully. Formerly they wired a panel for each process controlled, keeping track of pressure and gas exchanges by reading dials and turning valves at the right moment. Now, however, a microprocessor-based panel can be programmed to control these processes more safely and without operator error, according to its manufacturer, the Tylan Corp. of San Mateo, Calif.
Keywords :
Instruments; Laser beams; Measurement by laser beam; Microprocessors; Temperature measurement; Temperature sensors;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1983.6369934
Filename :
6369934
Link To Document :
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