DocumentCode
1363400
Title
Solid state: Integrated circuits: The case for gallium arsenide: This superfast semiconductor holds great promise for high-speed computers, and manufacturing difficulties are now beginning to be overcome
Author
Eden, R.C. ; Livingston, A.R. ; Welch, B.M.
Author_Institution
Gigabit Logic Inc., Newbury Park, CA, USA
Volume
20
Issue
12
fYear
1983
Firstpage
30
Lastpage
37
Abstract
A discussion is presented of fabrication technologies for manufacturing GaAs devices. Advantages and drawbacks of heterojunction devices are outlined. Areas of concern in GaAs production lines are also examined. The discussion covers the depletion-mode metal-semiconductor field-effect transistor (D-MESFET), the enhancement-mode MESFET (E-MESFET), and the high-electron-mobility transistor (HEMT).
Keywords
field effect transistors; gallium arsenide; D-MESFET; E-MESFET; GaAs production lines; HEMT; depletion-mode metal-semiconductor field-effect transistor; enhancement-mode MESFET; fabrication technologies; heterojunction devices; high-electron-mobility transistor; manufacturing GaAs devices; Gallium arsenide; HEMTs; Logic gates; MESFETs; Silicon; Threshold voltage;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/MSPEC.1983.6370057
Filename
6370057
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