DocumentCode
1363723
Title
2011 IEEE International Electron Devices Meeting (IEDM)
Volume
24
Issue
4
fYear
2011
Firstpage
566
Lastpage
566
Abstract
"Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers."
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2011.2172754
Filename
6062597
Link To Document