Title :
Near-Infrared Femtosecond Laser for Studying the Strain in
Alloy Films via Second-Harmonic Generation
Author :
Zhao, Ji-Hong ; Cheng, Bu-Wen ; Chen, Qi-Dai ; Su, Wen ; Jiang, Ying ; Chen, Zhan-Guo ; Jia, Gang ; Sun, Hong-Bo
Author_Institution :
State Key Lab. on Integrated Optoelectron., Jilin Univ., Changchun, China
Abstract :
The second-harmonic generation (SHG) from Si1-xGex alloy films has been investigated by near-infrared femtosecond laser. Recognized by s-out polarized SHG intensity versus rotational angle of sample, the crystal symmetry of the fully strained Si0.83Ge0.17 alloy is found changed from the Oh to the C2 point group due to the inhomogeneity of the strain. Calibrated by double crystal X-ray diffraction, the strain-induced χ(2) is estimated at 5.7 × 10-7 esu. According to the analysis on p-in/s-out SHG, the strain-relaxed Si0.10Ge0.90 alloy film is confirmed to be not fully relaxed, and the remaining strain is quantitatively determined to be around 0.1%.
Keywords :
Ge-Si alloys; X-ray diffraction; crystal symmetry; high-speed optical techniques; laser beam effects; light polarisation; optical films; optical harmonic generation; semiconductor thin films; SiGe; X-ray diffraction; crystal symmetry; near-infrared femtosecond laser; s-out polarized SHG intensity; second harmonic generation; Harmonic analysis; Lasers; Substrates; Ultrafast electronics; Ultrafast optics; $hbox{Si}_{1hbox{-}{ rm x}}hbox{Ge}_{rm x}$ alloy; Femtosecond laser; crystal symmetry; second-harmonic generation; strain;
Journal_Title :
Photonics Journal, IEEE
DOI :
10.1109/JPHOT.2010.2089976