Title :
Transmission lines and passive elements for multilayer coplanar circuits on silicon
Author :
Warns, Christoph ; Menzel, Wolfgang ; Schumacher, Hermann
Author_Institution :
Dept. of Microwave Tech., Ulm Univ., Germany
fDate :
5/1/1998 12:00:00 AM
Abstract :
In this paper, propagation properties of both standard and multilayer coplanar lines on different types of silicon substrates, as well as a number of quasi-lumped and stub-type circuit elements, are investigated. For the transmission lines, emphasis is placed on losses. As examples for circuit elements, a lumped parallel resonator and a high-low impedance low-pass filter are demonstrated
Keywords :
MMIC; coplanar waveguides; elemental semiconductors; losses; low-pass filters; lumped parameter networks; silicon; MMIC; Si; high-low impedance low-pass filter; losses; lumped parallel resonator; multilayer coplanar circuits; passive elements; propagation properties; quasi-lumped circuit elements; stub-type circuit elements; transmission lines; Coplanar transmission lines; Dielectric substrates; Dielectric thin films; Distributed parameter circuits; Impedance; Metallization; Nonhomogeneous media; Propagation losses; Silicon; Transmission lines;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
