Title :
Membrane-supported coplanar waveguides for MMIC and sensor application
Author :
Dehe, A. ; Klingbeil, H. ; Weil, C. ; Hartnagel, H.L.
Author_Institution :
Inst. fur Hochfrequenztech., Darmstadt Univ. of Technol., Germany
fDate :
5/1/1998 12:00:00 AM
Abstract :
Membrane-supported coplanar waveguides (CPWs) are needed for low-dispersive and low-loss millimeter- and submillimeter waves as well as for power sensor applications. The authors demonstrate CPWs on polyimid membranes micromachined on gallium arsenide (GaAs) that meet the requirements of a typical microwave monolithic integrated circuit (MMIC) process. The influence of the design parameters is simulated by finite difference in frequency domain (FDFD), in excellent agreement with the experiment. For a membrane CPW with ground to ground spacing of only 50 μm and characteristic impedance of 115 /spl Omega/, relative effective dielectric constants near 1.02 and attenuation of 0.14 dB/mm at 25 GHz have been achieved.
Keywords :
III-V semiconductors; MIMIC; MMIC; coplanar waveguides; electric sensing devices; gallium arsenide; membranes; microwave measurement; power measurement; 25 GHz; GaAs; MMIC application; design parameters; finite difference in frequency domain; membrane CPW; membrane-supported coplanar waveguides; micromachined membrane; microwave monolithic integrated circuit process; polyimid membranes; power sensor applications; Biomembranes; Circuit simulation; Coplanar waveguides; Finite difference methods; Frequency domain analysis; Gallium arsenide; Impedance; MMICs; Monolithic integrated circuits; Submillimeter wave integrated circuits;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
