A 1" format 1.5 M pixel IT-CCD image sensor for an HDTV camera system

Author

Sakakibara, Kiyohiko ; Yamamoto, Hidekazu ; Maegawa, Shigeto ; Kawashima, Hiroshi ; Nishioka, Yasutaka ; Yamawaki, Masao ; Asai, Sotoju ; Tsubouchi, Natsuro ; Okumura, Tomohide ; Fujino, Junichi

Author_Institution

Mitsubishi Electr. Corp., Hyogo, Japan

Volume

37

Issue

3

fYear

1991

fDate

8/1/1991 12:00:00 AM

Firstpage

487

Lastpage

493

Abstract

A 1-in. format 1.5-million pixel IT (interline transfer) CCD (charge coupled device) image sensor has been developed for an HDTV (high-definition television) camera system. To achieve a low smear ratio while maintaining a high level of sensitivity, the authors have developed a new impurity profile of a buried P⁺-layer and an on chip microlens array whose material is a deep-UV resist. Using this sensor, a high-fidelity picture with a horizontal resolution of 820 TV lines has been obtained. The IT-CCD sensor has achieved a smear ratio of less than -90 dB, a sensitivity level of 80 nA/Lx, and a maximum charge handling capacity of 1.2×10⁵ electrons

Keywords

CCD image sensors; colour television cameras; high definition television; 1 inch; 1.5 Mpixels; HDTV camera system; buried P⁺-layer; charge coupled device; colour TV camera; deep-UV resist; high-definition television; high-fidelity picture; horizontal resolution; impurity profile; interline transfer CCD image sensor; low smear ratio; maximum charge handling capacity; on chip microlens array; sensitivity level; Cameras; Charge coupled devices; Charge-coupled image sensors; HDTV; Image sensors; Impurities; Lenses; Microoptics; Pixel; TV;

fLanguage

English

Journal_Title

Consumer Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0098-3063

Type

jour

DOI

10.1109/30.85557

Filename

85557