Title :
A 1" format 1.5 M pixel IT-CCD image sensor for an HDTV camera system
Author :
Sakakibara, Kiyohiko ; Yamamoto, Hidekazu ; Maegawa, Shigeto ; Kawashima, Hiroshi ; Nishioka, Yasutaka ; Yamawaki, Masao ; Asai, Sotoju ; Tsubouchi, Natsuro ; Okumura, Tomohide ; Fujino, Junichi
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
fDate :
8/1/1991 12:00:00 AM
Abstract :
A 1-in. format 1.5-million pixel IT (interline transfer) CCD (charge coupled device) image sensor has been developed for an HDTV (high-definition television) camera system. To achieve a low smear ratio while maintaining a high level of sensitivity, the authors have developed a new impurity profile of a buried P+-layer and an on chip microlens array whose material is a deep-UV resist. Using this sensor, a high-fidelity picture with a horizontal resolution of 820 TV lines has been obtained. The IT-CCD sensor has achieved a smear ratio of less than -90 dB, a sensitivity level of 80 nA/Lx, and a maximum charge handling capacity of 1.2×105 electrons
Keywords :
CCD image sensors; colour television cameras; high definition television; 1 inch; 1.5 Mpixels; HDTV camera system; buried P+-layer; charge coupled device; colour TV camera; deep-UV resist; high-definition television; high-fidelity picture; horizontal resolution; impurity profile; interline transfer CCD image sensor; low smear ratio; maximum charge handling capacity; on chip microlens array; sensitivity level; Cameras; Charge coupled devices; Charge-coupled image sensors; HDTV; Image sensors; Impurities; Lenses; Microoptics; Pixel; TV;
Journal_Title :
Consumer Electronics, IEEE Transactions on
