Title :
Microcantilever Array Pressure Measurement System for Biomedical Instrumentation
Author :
Qu, Wenchao ; Islam, Syed Kamrul ; Mahfouz, Mohamed R. ; Haider, Mohammad R. ; To, Gary ; Mostafa, Salwa
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Tennessee, Knoxville, TN, USA
Abstract :
An analog signal processing integrated circuit for microcantilever array has been designed for pressure measurement in biomedical applications. The chip consists of analog multiplexer, instrumentation amplifier, sample-and-hold circuit, on-chip voltage and current references, successive approximation register analog-to-digital converter (ADC) and digital control unit. Root sum square (RSS) error from the overall pressure measurement system including microcantilever array and the application specific integrated circuit (ASIC) is only ±1.79 KPa within the measurement range of 0-300 KPa. The 8-bit ADC attains 45.4 dB signal-to-noise-and-distortion ratio (SNDR) and 56.4 dB spurious-free dynamic range (SFDR), while operating at 772 KHz. The integrated circuit has been fabricated using 0.35-¿m 2-poly 4-metal CMOS process technology. The chip occupies an area of 1.54 mm2 and consumes 17.8 mW of power with a single 3.3 V supply.
Keywords :
CMOS analogue integrated circuits; amplifiers; analogue integrated circuits; analogue processing circuits; analogue-digital conversion; application specific integrated circuits; bioMEMS; biomedical equipment; biomedical measurement; multiplexing equipment; pressure sensors; signal processing; ASIC; CMOS process; analog multiplexer; analog signal processing integrated circuit; analog-to-digital converter; application specific integrated circuit; biomedical instrumentation; current references; digital control unit; frequency 772 kHz; instrumentation amplifier; microcantilever array pressure measurement system; on-chip voltage references; power 17.8 mW; pressure 0 kPa to 300 kPa; root sum square error; sample-and-hold circuit; signal-to-noise-and-distortion ratio; spurious-free dynamic range; voltage 3.3 V; Analog integrated circuits; Application specific integrated circuits; Array signal processing; Biomedical measurements; Biomedical signal processing; Instruments; Multiplexing; Pressure measurement; Registers; Signal design; Analog multiplexer; analog-to-digital conversion (ADC); instrumentation amplifier; sample-and-hold;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2009.2034134
