• DocumentCode
    1365816
  • Title

    A SAW resonator with two-dimensional reflectors

  • Author

    Solal, Marc ; Gratier, Julien ; Kook, Taeho

  • Author_Institution
    TriQuint Semicond., Apopka, FL, USA
  • Volume
    57
  • Issue
    1
  • fYear
    2010
  • Firstpage
    30
  • Lastpage
    37
  • Abstract
    It is known that a part of the loss of leaky SAW resonators is due to radiation of acoustic energy in the bus-bars. Many researchers are working on so-called phononic crystals. A 2-D grating of very strong reflectors allows these devices to fully reflect, for a given frequency band, any incoming wave. A new device based on the superposition of a regular SAW resonator and a 2-D periodic grating of reflectors is proposed. Several arrangements and geometries of the reflectors were studied and compared experimentally on 48?? rotated Y-cut lithium tantalate. In particular, a very narrow aperture (7.5 ??) resonator was manufactured in the 900 MHz range. Because of its small size, this resonator has a resonance Q of only 575 when using the standard technology, whereas a resonance Q of 1100 was obtained for the new device without degradation of the other characteristics. Because of the narrow aperture, the admittance of the standard resonator showed a very strong parasitic above the resonance frequency, whereas this effect is drastically reduced for the new device. These results demonstrate the feasibility of the new approach.
  • Keywords
    busbars; diffraction gratings; electric admittance; lithium compounds; phononic crystals; surface acoustic wave resonators; 2D periodic grating; LiTaO3; Y-cut lithium tantalate; acoustic energy radiation; bus bars; frequency 900 MHz; leaky SAW resonator; narrow aperture resonator; parasitic admittance; phononic crystals; resonance frequency; two-dimensional reflector; Acoustic devices; Apertures; Crystals; Frequency; Geometry; Gratings; Lithium compounds; Manufacturing; Resonance; Surface acoustic waves; Acoustics; Computer-Aided Design; Equipment Design; Equipment Failure Analysis; Lenses; Micro-Electrical-Mechanical Systems; Reproducibility of Results; Sensitivity and Specificity; Transducers; Vibration;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2010.1375
  • Filename
    5361519