Title :
Effective Gate Layout Methods for RF Performance Enhancement in MOSFETs
Author :
Kim, Han-Su ; Park, Kangwook ; Oh, Hansu ; Jung, Eun Seung
Author_Institution :
Syst. LSI Div., Samsung Electron., Yongin, South Korea
Abstract :
Transistor scaling with CMOS technology evolution results in f max saturation in contrast to fT improvement. This letter presents effective improvement methods for such saturated f max in the transistors fabricated by 45-nm low-standby-power CMOS technology. The primary parameter investigated is the gate layout structure through changing the gate interconnects into several folded structures. It is demonstrated that we can achieve f max of above 500 GHz and f max/fT ratio of 2.9 in the transistors through applying the proposed gate layout structures. Such high f max results from the effective reduction in the gate resistance.
Keywords :
MOSFET; interconnections; millimetre wave devices; semiconductor device metallisation; CMOS technology evolution; MOSFET; RF performance enhancement; effective gate layout method; gate interconnects; size 45 nm; transistor scaling; Gate resistance; layout optimization; maximum oscillation frequency; radio-frequency transistors;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2009.2029128