Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects

Author

Luong, S.Q. ; Ortiz, G.G. ; Zhou, Y. ; Lu, Jun ; Hains, C.P. ; Cheng, Julian ; Hou, H.Q. ; Vawter, G.A.

Author_Institution

Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA

Volume

10

Issue

5

fYear

1998

fDate

5/1/1998 12:00:00 AM

Firstpage

642

Lastpage

644

Abstract

Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) growth rate on a patterned substrate. The repeatability of this technique was demonstrated by using different VCSEL and resonance-enhanced photodetector (REPD) arrays from the same wafer.

Keywords

integrated circuit technology; integrated optoelectronics; laser cavity resonators; optical fabrication; optical interconnections; parallel architectures; photodetectors; semiconductor laser arrays; MOCVD growth rate; epilayer structure; integrated optoelectronics; laser arrays; metal-organic chemical vapor deposition; monolithic wavelength-graded VCSEL; parallel optical interconnects; patterned substrate; resonance-enhanced photodetector arrays; resonance-enhanced photodetectors; topography-controlled enhancement; wavelength-graded vertical-cavity surface-emitting lasers; Chemical lasers; Chemical vapor deposition; MOCVD; Optical arrays; Photodetectors; Resonance; Surface emitting lasers; Surface topography; Surface waves; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.669222

Filename

669222