Title :
Monolithic wavelength-graded VCSEL and resonance-enhanced photodetector arrays for parallel optical interconnects
Author :
Luong, S.Q. ; Ortiz, G.G. ; Zhou, Y. ; Lu, Jun ; Hains, C.P. ; Cheng, Julian ; Hou, H.Q. ; Vawter, G.A.
Author_Institution :
Center for High Technol. Mater., New Mexico Univ., Albuquerque, NM, USA
fDate :
5/1/1998 12:00:00 AM
Abstract :
Monolithic arrays of wavelength-graded vertical-cavity surface-emitting lasers (VCSELs) and resonance-enhanced photodetectors (PDs) have been realized with the same epilayer structure using the topography-controlled enhancement and reduction of the metal-organic chemical vapor deposition (MOCVD) growth rate on a patterned substrate. The repeatability of this technique was demonstrated by using different VCSEL and resonance-enhanced photodetector (REPD) arrays from the same wafer.
Keywords :
integrated circuit technology; integrated optoelectronics; laser cavity resonators; optical fabrication; optical interconnections; parallel architectures; photodetectors; semiconductor laser arrays; MOCVD growth rate; epilayer structure; integrated optoelectronics; laser arrays; metal-organic chemical vapor deposition; monolithic wavelength-graded VCSEL; parallel optical interconnects; patterned substrate; resonance-enhanced photodetector arrays; resonance-enhanced photodetectors; topography-controlled enhancement; wavelength-graded vertical-cavity surface-emitting lasers; Chemical lasers; Chemical vapor deposition; MOCVD; Optical arrays; Photodetectors; Resonance; Surface emitting lasers; Surface topography; Surface waves; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
