DocumentCode
1367517
Title
Screening of variables for the empirical modelling of semiconductor devices
Author
Sprevak, D. ; Ferguson, R.S. ; Walton, A.J. ; Fallen, N. ; Newsam, M.I.
Author_Institution
Dept. of Stat. & Oper. Res., Queen´´s Univ., Belfast, UK
Volume
143
Issue
5
fYear
1996
fDate
9/1/1996 12:00:00 AM
Firstpage
319
Lastpage
326
Abstract
A strategy for screening the important effects in a multivariable response function is presented. An optimisation algorithm is developed, which searches for the optimum of the function in the subspace of the important variables, The application of these methods is illustrated with a known nonlinear 23 variable function. The technique is applied to the design of an NMOS process which depends on 35 factors
Keywords
MOS integrated circuits; electronic engineering computing; integrated circuit modelling; iterative methods; optimisation; probability; search problems; semiconductor device models; semiconductor process modelling; IC process simulation; NMOS process design; Q-Q plots; active main effects; computer simulation; empirical modelling; iterations; multivariable response function; nonlinear 23 variable function; optimisation algorithm; probability plots; quadratic function; screening of variables; semiconductor devices; subspace of important variables;
fLanguage
English
Journal_Title
Science, Measurement and Technology, IEE Proceedings -
Publisher
iet
ISSN
1350-2344
Type
jour
DOI
10.1049/ip-smt:19960485
Filename
536434
Link To Document