DocumentCode
1367833
Title
The Role of CuAlO Interface Layer for Switching Behavior of Al/
/Cu Memory Device
Author
Lv, Hangbing ; Tang, Tingao
Author_Institution
Microelectron. Dept., Fudan Univ., Shanghai, China
Volume
31
Issue
12
fYear
2010
Firstpage
1464
Lastpage
1466
Abstract
The interface layer between a reactive electrode and switching metal oxide is quite critical to improve the switching characteristics, but the intrinsic roles of this interfacial layer as oxygen reservoir or switching layer are still controversial. In this letter, we investigated the switching behavior of CuxO-based device by fully removing the top insulating Cu2O layer, with lower conductive gradient CuxO layer left. The devices with Pt/gradient CuxO/Cu structure were shorted; however, other devices with Al/gradient CuxO/Cu structure still functioned normally. We suggest the interface layer formed between Al and CuxO acts as the switching layer. The results of an annealing experiment further reinforce this conclusion. The samples with preannealing before Al electrode deposition show similar characteristics with the nonannealed samples; however, the postannealing devices exhibit tremendous difference. Both Rini and Vforming increase with the annealing temperature greatly.
Keywords
copper compounds; random-access storage; Al-CuO-Cu; aluminum electrode deposition; annealing temperature; conductive gradient; interface layer; memory device switching behavior; oxygen reservoir; postannealing devices; reactive electrode; switching layer; switching metal oxide; Annealing; Copper; Electrodes; Etching; MOS devices; Plasmas; Reactive power; Interface; RRAM; resistive switching (RS);
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2010.2081339
Filename
5618541
Link To Document