Title :
The Role of CuAlO Interface Layer for Switching Behavior of Al/
/Cu Memory Device
Author :
Lv, Hangbing ; Tang, Tingao
Author_Institution :
Microelectron. Dept., Fudan Univ., Shanghai, China
Abstract :
The interface layer between a reactive electrode and switching metal oxide is quite critical to improve the switching characteristics, but the intrinsic roles of this interfacial layer as oxygen reservoir or switching layer are still controversial. In this letter, we investigated the switching behavior of CuxO-based device by fully removing the top insulating Cu2O layer, with lower conductive gradient CuxO layer left. The devices with Pt/gradient CuxO/Cu structure were shorted; however, other devices with Al/gradient CuxO/Cu structure still functioned normally. We suggest the interface layer formed between Al and CuxO acts as the switching layer. The results of an annealing experiment further reinforce this conclusion. The samples with preannealing before Al electrode deposition show similar characteristics with the nonannealed samples; however, the postannealing devices exhibit tremendous difference. Both Rini and Vforming increase with the annealing temperature greatly.
Keywords :
copper compounds; random-access storage; Al-CuO-Cu; aluminum electrode deposition; annealing temperature; conductive gradient; interface layer; memory device switching behavior; oxygen reservoir; postannealing devices; reactive electrode; switching layer; switching metal oxide; Annealing; Copper; Electrodes; Etching; MOS devices; Plasmas; Reactive power; Interface; RRAM; resistive switching (RS);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2010.2081339