Efficient 3-D simulation of complex structures

A 3-D general-purpose device simulator is presented, and issues related to its geometrical flexibility and computational efficiency are discussed. Triangular-based prismatic elements are used as building blocks for the discretization of device equations, providing a reasonable tradeoff between simplicity and geometrical flexibility. Suitable numerical techniques, including a `local-solution´ algorithm, have been implemented in order to improve the computational efficiency of the code. A general treatment has been devised to handle floating-gate devices, which allows the program to cope with complex structures, such as a dual EPROM structure. Three-dimensional and two-dimensional simulation results are compared