Title :
Guest Editorial Equipment and Operations Automation in the Semiconductor Industry
Author :
Morrison, James R. ; Chien, Chen-Fu ; Dauzere-Peres, Stephane ; Dawande, Milind ; Ding, Han ; Pettinato, Jeffrey S. ; Yi, Jianjia
Author_Institution :
Korea Advanced Institute of Science and Technology (KAIST), Yuseong, Daejeon, Korea
Abstract :
The nine The ten papers in this special issue focus on three areas: equipment automation, operations automation, and modeling.
Keywords :
Electronics industry; Fabrication; Manufacturing systems; Special issues and sections;
Journal_Title :
Automation Science and Engineering, IEEE Transactions on
DOI :
10.1109/TASE.2010.2078870
