• DocumentCode
    1368183
  • Title

    A theoretical formula of E-H discharge transition power in a transformer-coupled discharge

  • Author

    Yoon, N.S. ; Kim, B.C. ; Yang, J.G. ; Hwang, S.M.

  • Author_Institution
    Korea Basic Sci. Inst., Taejon, South Korea
  • Volume
    26
  • Issue
    2
  • fYear
    1998
  • fDate
    4/1/1998 12:00:00 AM
  • Firstpage
    190
  • Lastpage
    197
  • Abstract
    Based on the recently developed heating theory (see Yoon et al., Phys. Rev. E, vol.55, no.6, p.7536-48 (1997)), a theoretical formula of E- and H-discharge transition power in a transformer-coupled plasma (TCP) discharge has been developed. The present result agrees well with an experimental observation for argon discharge
  • Keywords
    discharges (electric); plasma heating; Ar discharge; E-H discharge transition power; heating theory; plasma; transformer-coupled discharge; Electrons; Fault location; Frequency; Heating; Plasma applications; Plasma density; Plasma materials processing; Plasma sources; Plasma temperature; Skin effect;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.669626
  • Filename
    669626
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1368183