Title :
A theoretical formula of E-H discharge transition power in a transformer-coupled discharge
Author :
Yoon, N.S. ; Kim, B.C. ; Yang, J.G. ; Hwang, S.M.
Author_Institution :
Korea Basic Sci. Inst., Taejon, South Korea
fDate :
4/1/1998 12:00:00 AM
Abstract :
Based on the recently developed heating theory (see Yoon et al., Phys. Rev. E, vol.55, no.6, p.7536-48 (1997)), a theoretical formula of E- and H-discharge transition power in a transformer-coupled plasma (TCP) discharge has been developed. The present result agrees well with an experimental observation for argon discharge
Keywords :
discharges (electric); plasma heating; Ar discharge; E-H discharge transition power; heating theory; plasma; transformer-coupled discharge; Electrons; Fault location; Frequency; Heating; Plasma applications; Plasma density; Plasma materials processing; Plasma sources; Plasma temperature; Skin effect;
Journal_Title :
Plasma Science, IEEE Transactions on
