DocumentCode
1368605
Title
ICMTS´97
Volume
11
Issue
2
fYear
1998
fDate
5/1/1998 12:00:00 AM
Keywords
Capacitance; Circuit testing; Copper; Integrated circuit testing; Metrology; Plasma applications; Plasma devices; Plasma measurements; Pollution measurement; Wire;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.1998.670147
Filename
670147
Link To Document