Nonlinear model reduction strategies for rapid thermal processing systems

Author

Banerjee, Suman ; Cole, J.Vernon ; Jensen, Klavs F.

Author_Institution

Dept. of Chem. Eng., MIT, Cambridge, MA, USA

Volume

11

Issue

2

fYear

1998

fDate

5/1/1998 12:00:00 AM

Firstpage

266

Lastpage

275

Abstract

We present a systematic method for developing low order nonlinear models from physically based, large scale finite element models of rapid thermal processing (RTP) systems. These low order models are extracted from transient results of a detailed finite element model using the proper orthogonal decomposition (POD) method. Eigenfunctions obtained from the POD method are then used as basis functions in spectral Galerkin expansions of the governing partial differential equations solved by the finite element model to generate the reduced models. Simulation results with the reduced order models demonstrate good agreement with steady state and transient data generated from the finite element model, with an order of magnitude reduction in execution time

Keywords

Galerkin method; eigenvalues and eigenfunctions; finite element analysis; integrated circuit manufacture; partial differential equations; rapid thermal processing; reduced order systems; semiconductor device manufacture; FEM; RTP systems; basis functions; eigenfunctions; large scale finite element models; low order nonlinear models; nonlinear model reduction strategies; partial differential equations; proper orthogonal decomposition; rapid thermal processing; spectral Galerkin expansions; Chemical technology; Computational modeling; Eigenvalues and eigenfunctions; Fabrication; Finite element methods; Inductors; Manufacturing processes; Rapid thermal processing; Reduced order systems; Semiconductor device manufacture;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.670175

Filename

670175