Title :
Segment-based approach for real-time reactive rescheduling for automatic manufacturing control
Author_Institution :
C&C Media Res. Labs., NEC Corp., Kanagawa, Japan
fDate :
8/1/2000 12:00:00 AM
Abstract :
We propose a new segment-based approach for a real-time reactive rescheduling method. The approach is applicable to actual large-scale manufacturing systems, such as fully automated semiconductor wafer fabrication lines. The proposed method can efficiently (in terms of computation time) schedule processing operations at equipment units by dividing a wide scheduling range into small segments and by using a greedy scheduling algorithm. It can also reactivate infeasible schedules without sacrificing the quality of schedules in terms of productivity as much as possible. From the simulation results obtained, we experimentally confirmed that the proposed method reactivates, without significant productivity loss caused by the rescheduling algorithm itself, infeasible schedules faster than a comparative method commonly in use today. Consequently, the proposed method manages to keep schedules at each equipment unit executable in terms of processing performance and schedule quality
Keywords :
integrated circuit manufacture; production control; real-time systems; automatic manufacturing control; computation time; greedy scheduling algorithm; large-scale manufacturing systems; processing performance; productivity; real-time reactive rescheduling; schedule quality; segment-based approach; semiconductor wafer fabrication lines; Automatic control; Fabrication; Job shop scheduling; Large scale integration; Manufacturing automation; Manufacturing processes; Processor scheduling; Productivity; Scheduling algorithm; Semiconductor device manufacture;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on