Title :
Fully Reconfigurable Silicon Photonic Lattice Filters With Four Cascaded Unit Cells
Author :
Djordjevic, Stevan S. ; Luo, LianWee ; Ibrahim, Salah ; Fontaine, Nicolas K. ; Poitras, C.B. ; Guan, Binbin ; Zhou, Linje ; Okamoto, Katsunari ; Ding, Zhi ; Lipson, Michal ; Yoo, S.J.B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Davis, CA, USA
Abstract :
We present a fully reconfigurable optical filter built by cascading four identical unit cells. The devices are fabricated using two distinct methods: a complementary metal-oxide-semiconductor (CMOS) compatible process utilizes deep ultraviolet (DUV) lithography with tuning elements defined by ion implantation to make lateral p-i-n diodes for current injection regions, while an electron beam (E-beam) lithography process uses nickel chrome (NiCr) heaters as tuning elements. The fabricated devices are characterized using swept optical vector network analyzer (OVNA) coherent measurements.
Keywords :
MIS devices; electron beam lithography; elemental semiconductors; integrated optics; ion implantation; lattice filters; optical fabrication; optical filters; optical lattices; optical tuning; p-i-n diodes; silicon; ultraviolet lithography; Si; cascaded unit cells; current injection; device fabrication; electron beam lithography; ion implantation; metal-oxide-semiconductor compatible process; nickel chrome heaters; optical filter; optical vector network analyzer coherent measurement; p-i-n diodes; reconfigurable silicon photonic lattice filters; tuning elements; ultraviolet lithography; Lattices; Loss measurement; Optical filters; Optical waveguides; Poles and zeros; Silicon; CMOS compatible photonics; photonic reconfigurable filters; silicon ring resonators;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2010.2090868
