Impact of extrinsic and intrinsic parameter fluctuations on CMOS circuit performance

The yield of CMOS logic circuits satisfying a specific high performance requirement is demonstrated to be significantly influenced by the magnitude of critical-path delay deviations due to both extrinsic and intrinsic parameter fluctuations. To evaluate the impact of these parameter fluctuations, a static CMOS critical-path delay distribution is calculated from rigorously derived device and circuit models that enable projections for future technology generations. Two possible options are explored to attain a desired yield: (1) reduce performance by operating at a lower clock frequency; and (2) increase the supply voltage and, consequently, power dissipation, to satisfy the nominal critical-path delay. For the 50-nm technology generation, the delay and power dissipation increases are 12%-29% and 22%-6%, respectively, for extrinsic parameter standard deviations ranging from (a) 5% for effective channel length and 0% for gate oxide thickness and channel doping concentration to (b) 10% for effective channel length and 5% for gate oxide thickness and channel doping concentration. Combining both extrinsic and intrinsic fluctuations, the delay and power dissipation increase to 18%-32% and 31%-53%, respectively, thus demonstrating the significance of including the random dopant placement effect in future CMOS logic designs.