A 1.9-GHz CMOS VCO with micromachined electromechanically tunable capacitors

This paper presents a 1.9-GHz CMOS voltage-controlled oscillator (VCO) where the resonant circuit consists of micromachined electromechnically tunable capacitors and a bonding wire inductor. The tunable capacitors were implemented in a MUMP´s polysilicon surface micromachining process. These devices have a nominal capacitance of 2.1 pF and a quality factor (Q-factor) of 9.3 at 1.9 GHz. The capacitance is variable from 2.1 pF to 2.9 pF within a 4-V control, voltage range. The active circuits were fabricated in a 0.5-/spl mu/m CMOS process. The VCO was assembled in a ceramic package where the MUMP´s and CMOS dice were bonded together. The experimental VCO achieves a phase noise of -98 dBc/Hz and -126 dBc/Hz at 100 kHz and 600 kHz offsets from the carrier, respectively. The tuning range of the VCO is 9%. The VCO circuit and the output buffer consume 15 mW and 30 mW from a 2.7-V power supply, respectively.