Addition to "Development of a GaAs monolithic surface acoustic wave integrated circuit"

Author

Baca, A.G. ; Heller, E.J. ; Casalnuovo, S.A. ; Frye-Mason, G.C. ; Klem, John F. ; Drummond, T.J.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

35

Issue

8

fYear

2000

Firstpage

1253

Abstract

A reader correctly pointed out that the above paper was not the first example of a monolithic integration of surface acoustic wave (SAW) devices with electronics. Earlier work using ZnO layers over Al for SAW transducers on SiO2/Si substrate was integrated with Si-based electronics [Visser, J.H., 1989]. The authors were not aware of this work and certainly would have referenced it had they known about it. Readers are also referred to other interesting papers by van Zeijl and colleagues about the ZnO SAW technology and applications they addressed using it [1989-1992].

Keywords

III-V semiconductors; gallium arsenide; integrated circuit technology; monolithic integrated circuits; surface acoustic wave devices; GaAs; III-V semiconductors; SAW technology; SAW transducers; ZnO; monolithic surface acoustic wave integrated circuit; Acoustic waves; Clocks; Flat panel displays; Integrated circuit technology; Monolithic integrated circuits; Phase shifters; Receivers; Solid state circuits; Surface acoustic waves; Zinc oxide;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.859520

Filename

859520