• DocumentCode
    1370854
  • Title

    Wafer scale photonic-die attachment

  • Author

    Boudreau, Robert ; Zhou, Ping ; Bowen, Terry

  • Author_Institution
    Global Electron. Technol., AMP Inc., Harrisburg, PA, USA
  • Volume
    21
  • Issue
    2
  • fYear
    1998
  • fDate
    5/1/1998 12:00:00 AM
  • Firstpage
    136
  • Lastpage
    139
  • Abstract
    A diebonding system has been developed for the bonding of photonic chips, such as lasers and photo detectors, at a rate suitable for low cost manufacturing. This system is designed for wafer scale diebonding, making it compatible with wafer scale fabrication. This system combines the passive positional optical alignment of photonic chips on a silicon or glass wafer board surface with materials handling in order to make the process manufacturable. The process is fluxless, minimizing contamination of optical surfaces, and diebonding is controlled to a very small area allowing localized attachment of many die without disturbing previously placed die
  • Keywords
    integrated optoelectronics; microassembling; optical fibres; packaging; transceivers; wafer-scale integration; contamination; diebonding system; localized attachment; low cost manufacturing; materials handling; passive positional optical alignment; photonic chips; wafer scale fabrication; wafer scale photonic-die attachment; Costs; Fiber lasers; Manufacturing processes; Optical fiber devices; Optical fibers; Optical receivers; Optical transmitters; Packaging; Silicon; Wafer bonding;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9894
  • Type

    jour

  • DOI
    10.1109/96.673700
  • Filename
    673700