Title :
Micromachined accelerometer with modulated integrative differential optical sensing
Author :
Degani, 0. ; Seter, D. ; Socher, E. ; Kaldor, S. ; Nemirovsky, Y.
Author_Institution :
Kidron Microelectron. Res. Centre, Technion-Israel Inst. of Technol., Haifa, Israel
fDate :
4/2/1998 12:00:00 AM
Abstract :
A novel electro-optical sensing method for measuring the displacements of a micromachined accelerometer proof mass is described. By using on-chip integrated photodiodes, and by modulating the illumination, accelerations at very low frequencies are detected. A 10 μg/√Hz noise equivalent acceleration (NEA) is predicted. Characterisation of the CMOS read-out circuits and on-chip integrated sensing photodiodes is presented. Preliminary measurements on a prototype device are reported
Keywords :
accelerometers; micromachining; microsensors; optical sensors; photodiodes; CMOS read-out circuits; electro-optical sensing method; micromachined accelerometer; modulated integrative differential optical sensing; noise equivalent acceleration; on-chip integrated sensing photodiodes; proof mass;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980484
