• DocumentCode
    1371390
  • Title

    Suspended optical waveguide with in-plane degree of freedom for microelectromechanical applications

  • Author

    Haronian, D.

  • Author_Institution
    Fac. of Eng., Tel Aviv Univ., Israel
  • Volume
    34
  • Issue
    7
  • fYear
    1998
  • fDate
    4/2/1998 12:00:00 AM
  • Firstpage
    663
  • Lastpage
    665
  • Abstract
    A suspended optical waveguide displacement sensor (SOWDS) based on single crystal silicon beams with an inherent in-plane degree of freedom is presented. The SOWDS technology is based on the single crystal silicon reactive ion etching and metallisation (SCREAM) process, and opens new methods of monolithically integrating optical manipulation with SCREAM based sensors and actuators
  • Keywords
    displacement measurement; elemental semiconductors; micromechanical devices; optical planar waveguides; silicon; sputter etching; SCREAM; SOWDS; Si; displacement sensor; in-plane degree of freedom; metallisation; microelectromechanical applications; optical manipulation; reactive ion etching; suspended optical waveguide;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19980500
  • Filename
    673786
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1371390