• DocumentCode
    1371564
  • Title

    Piezoelectric KNbO3 films for SAW device applications

  • Author

    Yamanouchi, Kazuhiko ; Odagawa, Hiroyuki ; Kojima, T. ; Onoe, A. ; Yoshida, Atsushi ; Chikuma, K.

  • Author_Institution
    Res. Inst. of Electr. Commun., Tohoku Univ., Sendai
  • Volume
    34
  • Issue
    7
  • fYear
    1998
  • fDate
    4/2/1998 12:00:00 AM
  • Firstpage
    702
  • Lastpage
    703
  • Abstract
    KNbO3 films have been deposited on STO (SrTiO3 ) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960MHz and λ/h=0.24 (λ=SAW wavelength, h=KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals
  • Keywords
    CVD coatings; piezoelectric thin films; potassium compounds; surface acoustic wave devices; 960 MHz; KNbO3; MOCVD; SAW device; STO substrate; SrTiO3; electromechanical coupling coefficient; piezoelectric KNbO3 film; piezoelectric constant;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19980475
  • Filename
    673813
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1371564