Title :
Piezoelectric KNbO3 films for SAW device applications
Author :
Yamanouchi, Kazuhiko ; Odagawa, Hiroyuki ; Kojima, T. ; Onoe, A. ; Yoshida, Atsushi ; Chikuma, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai
fDate :
4/2/1998 12:00:00 AM
Abstract :
KNbO3 films have been deposited on STO (SrTiO3 ) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show electromechanical coupling coefficients (K2) of 0.021 at the centre frequency of 960MHz and λ/h=0.24 (λ=SAW wavelength, h=KNbO3 film thickness). These values are in fairly good agreement with theoretical values calculated using the piezoelectric constants of single crystals
Keywords :
CVD coatings; piezoelectric thin films; potassium compounds; surface acoustic wave devices; 960 MHz; KNbO3; MOCVD; SAW device; STO substrate; SrTiO3; electromechanical coupling coefficient; piezoelectric KNbO3 film; piezoelectric constant;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980475
