DocumentCode :
1373798
Title :
Investigation of Thermosonic Wire Bonding Resistance of Gold Wire Onto Copper Pad
Author :
Jeng, Yeau-Ren ; Chiu, Sang-Mao ; Huang, Pay-Yau ; Shyu, Shiuh-Hwa
Author_Institution :
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
Volume :
33
Issue :
1
fYear :
2010
Firstpage :
65
Lastpage :
70
Abstract :
This paper discusses the electric performance for thermosonic wire bonding of gold wire onto copper pads. Various methods normally used to improve bondability were investigated including the bare copper pads with argon shielding gas and the copper pads with cupric oxide film, cuprous oxide film, and silver film. The micro-contact theory was used to determine the effective contact area. The circuit contact resistance was measured for each sample and was presented in terms of ultrasound power and effective contact area. The results show that the increase in the effective contact area leads to a lower circuit contact resistance before reaching a minimum value, and further increase in the effective contact area would not have noticeable effect on the resistance.
Keywords :
contact resistance; copper; gold; integrated circuit bonding; integrated circuit interconnections; lead bonding; Au-Cu; argon shielding gas; circuit contact resistance; copper pad; cupric oxide film; cuprous oxide film; effective contact area; electric performance; gold wire; microcontact theory; silver film; thermosonic wire bonding; Chips with copper interconnects; contact resistance; micro-contact theory; thermosonic bonding;
fLanguage :
English
Journal_Title :
Electronics Packaging Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
1521-334X
Type :
jour
DOI :
10.1109/TEPM.2009.2034467
Filename :
5371827
Link To Document :
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