DocumentCode
1376551
Title
Six-beam piezoresistive accelerometer with self-cancelling cross-axis sensitivity
Author
Sim, J.H. ; Kim, Duk Kyung ; Bae, Y.H. ; Nam, K.H. ; Lee, J.H.
Author_Institution
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Taegu
Volume
34
Issue
5
fYear
1998
fDate
3/5/1998 12:00:00 AM
Firstpage
497
Lastpage
499
Abstract
A novel six-beam piezoresistive accelerometer with self-cancelling cross-axis sensitivity was constructed using a unique porous silicon micromachining technique. The comparatively low sensitivity of a six-beam structure, due to the additional beams, can be simply overcome using a summing circuit. Moreover, the cross-axis sensitivity can be significantly reduced. A sensor with a summing circuit can exhibit a sensitivity of 0.68 mV/g with a nonlinearity of <2.0% up to 8 g, a cross-axis sensitivity of <1.0%, and a first resonant frequency of ~4.24 kHz
Keywords
accelerometers; micromachining; microsensors; piezoresistive devices; sensitivity; Si; nonlinearity; porous silicon micromachining; resonant frequency; self-cancelling cross-axis sensitivity; sensor; six-beam piezoresistive accelerometer; summing circuit;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980354
Filename
674244
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