Title :
Initial results for a quadrupole mass spectrometer with a silicon micromachined mass filter
Author :
Taylor, S. ; Tunstall, J.J. ; Syms, R.R.A. ; Tate, T. ; Ahmad, M.M.
Author_Institution :
Dept. of Electr. Eng. & Electron., Liverpool Univ., UK
fDate :
3/19/1998 12:00:00 AM
Abstract :
Initial results are presented from tests of a low voltage, low power, miniature quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of the device is discussed, along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of the lens including a mass spectrum for an argon/air mixture and the effect of cage voltage, emission current and pressure on the performance
Keywords :
mass spectrometer accessories; micromachining; silicon; Si; argon/air mixture; ion source; lens; low voltage low power miniature quadrupole mass spectrometer; silicon micromachined mass filter; vacuum system;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980410
