DocumentCode
1377549
Title
Characterisation of Schottky junctions on In0.235Ga0.765As0.536P0.464 lattice-matched to GaAs
Author
Sugino, T. ; Kousaka, T.
Author_Institution
Dept. of Electr. Eng., Osaka Univ., Japan
Volume
34
Issue
6
fYear
1998
fDate
3/19/1998 12:00:00 AM
Firstpage
595
Lastpage
597
Abstract
InGaAsP Schottky junctions are formed with various metals such as Au, Cu and Ag. Schottky barrier heights as high as 0.98 eV are obtained. Irrespective of the Schottky metals used. From the contact potential difference, estimated using Kelvin probe measurement, it is found that the Fermi level is pinned at the surface of InGaAsP treated by wet-etching. The thermal stability of InGaAsP Schottky junctions is examined. An effective Schottky barrier height of >0.98 eV is maintained at an annealing temperature as high as 250°C
Keywords
Fermi level; III-V semiconductors; Schottky barriers; Schottky gate field effect transistors; annealing; contact potential; etching; gallium arsenide; indium compounds; 0.98 eV; 250 degC; Fermi level; InGaAsP-GaAs; Kelvin probe measurement; MESFETs; Schottky junctions; annealing temperature; barrier heights; contact potential difference; thermal stability; wet-etching;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980456
Filename
674310
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