Title :
Micromachined optical tunable filter for long term stability gas sensors
Author :
Alause, H. ; Malzac, J.P. ; Grasdepot, F. ; Nouaze, V. ; Hermann, J. ; Knap, W.
Author_Institution :
Group of Semicond. Studies, Univ. des Sci. et Tech. du Languedoc, Montpellier, France
fDate :
10/1/1997 12:00:00 AM
Abstract :
A new component is presented: a tunable optical filter that can provide autocalibration of optical gas sensors and thus improve their long term stability. The device comprises three micromachined silicon wafers separated by two air gaps. It is shown that it can be applied as an electrically tunable Fabry-Perot filter, and used for the detection of gases that have spectral absorption bands in the infrared domain of wavelengths between 2 and 8 μm. Calculations are performed to explain the mechanical and optical properties of the device under different applied voltages
Keywords :
Fabry-Perot resonators; calibration; electro-optical filters; gas sensors; infrared spectra; micromachining; silicon; spectrochemical analysis; stability; tuning; 2 to 8 mum; IR detectors; air gaps; applied voltages; autocalibration; electrically tunable Fabry-Perot filter; infrared domain; long term stability gas sensors; micromachined optical tunable filter; micromachined silicon wafers; optical gas sensors; spectral absorption bands;
Journal_Title :
Optoelectronics, IEE Proceedings -
DOI :
10.1049/ip-opt:19971575
