Micromachined optical tunable filter for long term stability gas sensors

Author

Alause, H. ; Malzac, J.P. ; Grasdepot, F. ; Nouaze, V. ; Hermann, J. ; Knap, W.

Author_Institution

Group of Semicond. Studies, Univ. des Sci. et Tech. du Languedoc, Montpellier, France

Volume

144

Issue

5

fYear

1997

fDate

10/1/1997 12:00:00 AM

Firstpage

350

Lastpage

354

Abstract

A new component is presented: a tunable optical filter that can provide autocalibration of optical gas sensors and thus improve their long term stability. The device comprises three micromachined silicon wafers separated by two air gaps. It is shown that it can be applied as an electrically tunable Fabry-Perot filter, and used for the detection of gases that have spectral absorption bands in the infrared domain of wavelengths between 2 and 8 μm. Calculations are performed to explain the mechanical and optical properties of the device under different applied voltages

Keywords

Fabry-Perot resonators; calibration; electro-optical filters; gas sensors; infrared spectra; micromachining; silicon; spectrochemical analysis; stability; tuning; 2 to 8 mum; IR detectors; air gaps; applied voltages; autocalibration; electrically tunable Fabry-Perot filter; infrared domain; long term stability gas sensors; micromachined optical tunable filter; micromachined silicon wafers; optical gas sensors; spectral absorption bands;

fLanguage

English

Journal_Title

Optoelectronics, IEE Proceedings -

Publisher

iet

ISSN

1350-2433

Type

jour

DOI

10.1049/ip-opt:19971575

Filename

674340