Large modulation depth, single-moded quantum well waveguide modulator operating around 1.57 mu m

The performance of long wavelength single-mode waveguide modulators suitable for monolithic integration with a quantum well laser is reported. The device operated between 1.560 mu m and 1.570 mu m. The guiding layer was formed by a 0.27 mu m quaternary layer at the centre of which were four 50 AA In_0.53Ga_0.47As quantum wells separated by 100 AA InP barrier layers. Lateral confinement was obtained by etching ridges in the top InP contact layer. For devices of 500 mu m length, a modulation depth of 19 dB was obtained at a wavelength of 1.568 mu m with a reverse bias voltage of only 3 V and an internal loss of 2.5 dB.