DocumentCode :
1378885
Title :
Compensation for geometrical variations in coplanar waveguide probe-tip calibration
Author :
Walker, David K. ; Williams, Dylan F.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
Volume :
7
Issue :
4
fYear :
1997
fDate :
4/1/1997 12:00:00 AM
Firstpage :
97
Lastpage :
99
Abstract :
We show how coplanar-waveguide probe-tip scattering parameter calibrations performed in one coplanar waveguide conductor geometry may be adjusted for measurement in another. The method models the difference between the two probe-tip-to-coplanar-waveguide transitions as a change in shunt capacitance and applies previously developed techniques for its determination and compensation. Comparison to accurate multiline Thru-Reflect-Line calibrations verifies the accuracy of the method. Differences in both conductor geometry and substrate permittivity are considered in the comparison. The method requires only a single, compact open stub or thru line fabricated on the measurement wafer
Keywords :
S-parameters; calibration; coplanar waveguides; microwave measurement; compensation; conductor geometry; measurement wafer; multiline Thru-Reflect-Line; open stub; probe-tip-to-coplanar-waveguide transition; scattering parameter calibration; shunt capacitance; substrate permittivity; Calibration; Capacitance; Conductors; Coplanar waveguides; Geometry; Performance evaluation; Permittivity measurement; Semiconductor device modeling; Testing; Transmission line measurements;
fLanguage :
English
Journal_Title :
Microwave and Guided Wave Letters, IEEE
Publisher :
ieee
ISSN :
1051-8207
Type :
jour
DOI :
10.1109/75.563631
Filename :
563631
Link To Document :
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