Title :
Compensation for geometrical variations in coplanar waveguide probe-tip calibration
Author :
Walker, David K. ; Williams, Dylan F.
Author_Institution :
Nat. Inst. of Stand. & Technol., Boulder, CO, USA
fDate :
4/1/1997 12:00:00 AM
Abstract :
We show how coplanar-waveguide probe-tip scattering parameter calibrations performed in one coplanar waveguide conductor geometry may be adjusted for measurement in another. The method models the difference between the two probe-tip-to-coplanar-waveguide transitions as a change in shunt capacitance and applies previously developed techniques for its determination and compensation. Comparison to accurate multiline Thru-Reflect-Line calibrations verifies the accuracy of the method. Differences in both conductor geometry and substrate permittivity are considered in the comparison. The method requires only a single, compact open stub or thru line fabricated on the measurement wafer
Keywords :
S-parameters; calibration; coplanar waveguides; microwave measurement; compensation; conductor geometry; measurement wafer; multiline Thru-Reflect-Line; open stub; probe-tip-to-coplanar-waveguide transition; scattering parameter calibration; shunt capacitance; substrate permittivity; Calibration; Capacitance; Conductors; Coplanar waveguides; Geometry; Performance evaluation; Permittivity measurement; Semiconductor device modeling; Testing; Transmission line measurements;
Journal_Title :
Microwave and Guided Wave Letters, IEEE