Title :
Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides
Author :
Chu, A.K. ; Lee, K.M. ; Pong, B.J. ; Lin, C.J. ; Ho, W.-J. ; Shih, T.T.
Author_Institution :
Integrated Optolectron., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
fDate :
8/31/2000 12:00:00 AM
Abstract :
A hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarised lights, respectively
Keywords :
light polarisation; light reflection; optical fabrication; optical films; optical losses; optical materials; optical planar waveguides; optical polymers; polymer films; ridge waveguides; tantalum compounds; 1.3 mum; ARROW; Si; Si substrates; TE polarised light; TM polarised light; Ta2O5; antiresonant reflecting optical waveguide; fluorinated polyimide; hybrid layers; hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides; propagation losses;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001096
