DocumentCode
138092
Title
Adhesion work analysis by molecular modelling and wetting angle measurement
Author
Allaf, Kamil Nouri ; Krol, Dawid Jan ; Wymyslowski, A. ; Zubel, I. ; Rola, K.
Author_Institution
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
fYear
2014
fDate
7-9 April 2014
Firstpage
1
Lastpage
5
Abstract
The molecular modelling was be applied in order to calculate the work of adhesion between solutions of water, isopropyl alcohol (IPA) and silicon. The work of adhesion was calculated by using two computational methods based on experiment as well as numerical simulations. The method of wetting angle in case of the molecular modelling was used in order to compare simulation results with with the wetting angle experimental results. The main aim of the work was to make a comparison between the achieved values of the work of adhesion using simulations and the experiment. In comparison to the previously reported results, the current goal was to continue the research in order to improve and apply the developed method for surfactants, which are used in a process of silicon etching. Better understanding of adhesion phenomena can result in improvement of etching and the same can lead to the quality improvement of MEMS devices, as well as reduce their production cost. This work continues the previous research in that area where wetting angle and other methods where used to determine the adhesion work between IPA and silicon.
Keywords
adhesion; elemental semiconductors; etching; numerical analysis; organic compounds; silicon; surfactants; water; wetting; H2O; MEMS device; Si; adhesion work analysis; computational methods; isopropyl alcohol; molecular modelling; numerical simulation; silicon etching; surfactant; wetting angle measurement; Abstracts; Accuracy; Adhesives; Analytical models; Energy measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2014 15th international conference on
Conference_Location
Ghent
Print_ISBN
978-1-4799-4791-1
Type
conf
DOI
10.1109/EuroSimE.2014.6813799
Filename
6813799
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