• DocumentCode
    1381369
  • Title

    Gate Voltage Influence on the Channel Hot-Carrier Degradation of High- k -Based Devices

  • Author

    Amat, E. ; Kauerauf, T. ; Degraeve, R. ; Rodríguez, R. ; Nafría, M. ; Aymerich, X. ; Groeseneken, G.

  • Author_Institution
    Electron. Eng. Dept., Univ. Autonoma de Barcelona, Bellaterra, Spain
  • Volume
    11
  • Issue
    1
  • fYear
    2011
  • fDate
    3/1/2011 12:00:00 AM
  • Firstpage
    92
  • Lastpage
    97
  • Abstract
    In ultrascaled complimentary metal-oxide-semiconductor technologies, the lucky-electron model does not describe correctly Channel Hot-Carrier (CHC) degradation for typical transistor test conditions independently of the gate dielectric (SiO2 or high- k). A new model to describe the CHC degradation behavior in n-channel metal-oxide field-effect transistors, based on the dominant role of the gate voltage into the total CHC stress, is presented. This new model can be applicable to long- and short-channel transistors with high- k or SiO2 as a dielectric.
  • Keywords
    MOSFET; high-k dielectric thin films; hot carriers; semiconductor device reliability; silicon compounds; SiO2; channel hot-carrier degradation; gate voltage; high-k-based devices; lucky-electron model; metal-oxide field-effect transistors; High-$k$; hot carriers; reliability;
  • fLanguage
    English
  • Journal_Title
    Device and Materials Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1530-4388
  • Type

    jour

  • DOI
    10.1109/TDMR.2010.2093138
  • Filename
    5638616