DocumentCode :
1382475
Title :
A Sonochemical Approach to the Fabrication of Laterally Aligned ZnO Nanorod Field Emitter Arrays on a Planar Substrate
Author :
Jung, Seung-Ho ; Shin, Nayoung ; Kim, Nam-Hyo ; Lee, Kun-Hong ; Jeong, Soo-Hwan
Author_Institution :
Dept. of Chem. Eng., Pohang Univ. of Sci. & Technol., Pohang, South Korea
Volume :
10
Issue :
2
fYear :
2011
fDate :
3/1/2011 12:00:00 AM
Firstpage :
319
Lastpage :
324
Abstract :
A simple and novel sonochemical route has been demonstrated to produce the lateral growth of zinc oxide (ZnO) nanorod arrays on a quartz wafer without the use of metal catalysts. Highly crystalline ZnO nanorods grew laterally on the edge of a Zn thin film seed layer, with preferential growth along the [0001] direction. The average diameter and length of the ZnO nanorods, grown laterally from the edge of the Zn thin film, were 156 and 933 nm, respectively. The vertical growth of ZnO nanorods on the top surface of the seed layer was suppressed by a Si thin film growth barrier. The lateral ZnO nanorod arrays showed excellent field emission properties, 60 mA/cm2 at 6.5 V/μm, with a low turn-on field in the range of 3.9-4.0 V/μm. Because of the compatibility of this process with current standard semiconductor microfabrication technologies, this sonochemical approach constitutes a practical technique for the design of state-of-the-art nanodevices based on laterally grown ZnO nanorod arrays on planar substrates.
Keywords :
II-VI semiconductors; catalysis; field emission; field emitter arrays; metallic thin films; nanofabrication; nanorods; quartz; semiconductor growth; semiconductor thin films; wide band gap semiconductors; zinc compounds; ZnO; field emission properties; highly crystalline nanorods; lateral growth; laterally aligned zinc oxide nanorod field emitter arrays; metal catalysts; planar substrate; quartz wafer; size 156 nm; size 933 nm; sonochemical approach; sonochemical route; standard semiconductor microfabrication technology; state-of-the-art nanodevices; thin film growth barrier; thin film seed layer; vertical growth; Electron emission; nanorods; sonochemistry; zinc oxide (ZnO);
fLanguage :
English
Journal_Title :
Nanotechnology, IEEE Transactions on
Publisher :
ieee
ISSN :
1536-125X
Type :
jour
DOI :
10.1109/TNANO.2010.2040396
Filename :
5382600
Link To Document :
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