Normally On/Off Integrated Latching Acceleration Switch With Controlled Fracture Beams and Independent Multicontact

Author

Guo, Zhongyang ; Zhao, Qiancheng ; Lin, Longtao ; Yang, Zhenchuan ; Xie, Huikai ; Yan, Guizhen

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

Volume

31

Issue

2

fYear

2010

Firstpage

129

Lastpage

131

Abstract

This letter reports an acceleration latching switch with integrated normally on/off paths. The normally on path, formed by notched beams connected in series, will be broken and latched to reach the open state when the acceleration exceeds the threshold. A multicontact is adopted for the normally off path, while both paths are mechanically separated from the proof mass to prevent them from the impact of the proof mass at the latched state. Experimental results show that the latching shock is 10 000 G, and the response time is about 0.1 ms. The normally on path has an on-state resistance of 4.0 ?? and an allowable current of 200 mA, whereas the normally off path has an on-state resistance of 3.8 ?? and a maximum current of 140 mA.

Keywords

electrical contacts; microswitches; controlled fracture beams; current 140 mA; current 200 mA; independent multicontact; integrated latching acceleration switch; proof mass; resistance 3.8 ohm; resistance 4.0 ohm; Acceleration switches; integrated; latching switches; microelectromechanical devices; normally off; normally on;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2009.2036575

Filename

5382602