Parallel-beam sensor/actuator unit and its application to the gyroscope

Author

Sato, Hiroshi ; Fukuda, Toshio ; Arai, Fumihito ; Itoigawa, Kouichi ; Tsukahara, Yasunori

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

Volume

5

Issue

3

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

266

Lastpage

272

Abstract

Proposes application of a parallel-beam structure to the gyroscope. The parallel-beam structure has the following significant features: 1) the tip moves in parallel at the end; 2) this structure converts the small displacement into a large concentrated strain; 3) even though some units are piled up, each unit does not interfere with another; and 4) the lateral rigidity is high. We analyzed these basic features by finite-element method analysis. We have proposed the parallel-beam sensor/actuator unit using this structure, and a new gyroscope. We show two methods to improve its performance; these are resonant frequency control and mechanical coupling suppression. It is concluded that the proposed structure is suited to the gyroscope

Keywords

finite element analysis; frequency control; gyroscopes; piezoelectric actuators; piezoelectric transducers; vibration control; lateral rigidity; mechanical coupling suppression; parallel-beam sensor/actuator unit; resonant frequency control; Actuators; Capacitive sensors; Force sensors; Gyroscopes; Mechanical sensors; Optical sensors; Optical variables control; Resonance; Resonant frequency; Vibrations;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/3516.868918

Filename

868918