Title :
A new approach for modeling drain current process variability applied to FDSOI technology
Author :
Denis, Y. ; Monsieur, F. ; Petit, D. ; Tavernier, C. ; Jaouen, H. ; Ghibaudo, Gerard
Author_Institution :
STMicroelectron., Crolles, France
Abstract :
This paper proposes a novel methodology for modeling process related FDSOI MOSFET drain current variability. The novelty of our methodology is to combine statistical analysis tools (RSM, Stepwise Regression (SWR) and DOE) with a simple analytical drain current model. Our approach is finally compared to conventional least square method (LSM) and SWR.
Keywords :
MOSFET; design of experiments; regression analysis; silicon-on-insulator; DOE; FDSOI MOSFET; LSM; RSM; SWR; analytical drain current model; design of experiment; drain current process variability modeling; least square method; statistical analysis tools; stepwise regression; Decision support systems; DOE; FDSOI MOSFET; Process compact modeling; RSM; Stepwise Regression; drain current variability; process variability;
Conference_Titel :
Ultimate Integration on Silicon (ULIS), 2014 15th International Conference on
Conference_Location :
Stockholm
DOI :
10.1109/ULIS.2014.6813924