DocumentCode
1383358
Title
Measurement of the switching speed of single FET´s
Author
Jenkins, Keith A. ; Burghartz, Joachim N.
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Volume
45
Issue
6
fYear
1998
fDate
6/1/1998 12:00:00 AM
Firstpage
1369
Lastpage
1373
Abstract
The measurement of the signal delay through a single FET as an estimate of its performance is discussed. It is shown that instead of relying on small ac signals for performance characterization, delays of full logic swings can be accurately measured with conventional electronic equipment. The measurement apparatus is described, and data obtained with advanced submicron FET´s is presented, showing that device switching delays can be measured with resolution on the order of 10 ps. Such device delay measurements can be of use in evaluating technologies, and diagnosing performance problems
Keywords
MOSFET; characteristics measurement; delays; semiconductor device testing; FET; device switching; full logic swings; performance characterization; signal delay; switching speed; Delay effects; FETs; Logic devices; MOSFETs; Propagation delay; Pulse measurements; Signal resolution; Time measurement; Transistors; Velocity measurement;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.678581
Filename
678581
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