Title :
Correspondence - Analysis of thickness vibrations of c-axis inclined zig-zag two-layered zinc oxide thin-film resonators
Author :
Haifeng Zhang ; Kosinski, J.A.
Author_Institution :
Dept. of Eng. Technol., Univ. of North Texas, Denton, TX, USA
Abstract :
The free vibrations of a two-layered C-axis inclined zig-zag ZnO thin-film bulk acoustic wave resonator (FBAR) connected to external impedance are analyzed. The frequency equation and mode shape for this resonator are derived based on the linear piezoelectric theory. The impedance characteristics of the FBAR are derived and compared with previous experimental results.
Keywords :
II-VI semiconductors; acoustic impedance; acoustic resonators; bulk acoustic wave devices; piezoelectricity; thin film devices; vibrations; wide band gap semiconductors; zinc compounds; C-axis inclined zig-zag two-layered zinc oxide thin-film resonators; FBAR; bulk acoustic wave resonator; external impedance characteristics; free vibrations; frequency equation; linear piezoelectric theory; mode shape; thickness vibrations; Electrodes; Equations; Film bulk acoustic resonators; Impedance; Mathematical model; Resonant frequency; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2012.2526
