Track profile study of ABS-patterned narrow track thin film inductive heads

Author

Partee, Charles ; Torabi, Adam F.

Author_Institution

Quantum Corp., Louisville, CO, USA

Volume

32

Issue

5

fYear

1996

fDate

9/1/1996 12:00:00 AM

Firstpage

3539

Lastpage

3541

Abstract

ABS-patterning is a known method for achieving the ever-increasing track density requirements of today´s disk drives. This patterning leaves a shoulder on either side of the head which can affect the track profile of the head. Therefore, the height and width of this shoulder are important parameters to control when fabricating heads in this fashion. In this study, we examine the effect of the shoulder width and the shoulder height on the cross-track performance. We conclude that a shoulder height of 0.75 μm is sufficient to minimize the effect of a shoulder width of up to 1 μm. A 3D model was constructed and shows good agreement with the data. The model was used to predict throat-height tolerance and to model wider shoulder widths

Keywords

finite element analysis; magnetic heads; magnetic recording; magnetic thin film devices; 0.75 mum; 1 mum; 3D model; ABS-patterning; NLTS; cross-track performance; disk drives; finite element model; narrow track heads; overwrite; shoulder height; shoulder width; thin film inductive heads; throat-height tolerance; track density requirements; track profile; Disk drives; Etching; Fabrication; Finite element methods; Lithography; Predictive models; Resists; Surfaces; Transistors; Writing;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.538683

Filename

538683