DocumentCode :
1384500
Title :
Track profile study of ABS-patterned narrow track thin film inductive heads
Author :
Partee, Charles ; Torabi, Adam F.
Author_Institution :
Quantum Corp., Louisville, CO, USA
Volume :
32
Issue :
5
fYear :
1996
fDate :
9/1/1996 12:00:00 AM
Firstpage :
3539
Lastpage :
3541
Abstract :
ABS-patterning is a known method for achieving the ever-increasing track density requirements of today´s disk drives. This patterning leaves a shoulder on either side of the head which can affect the track profile of the head. Therefore, the height and width of this shoulder are important parameters to control when fabricating heads in this fashion. In this study, we examine the effect of the shoulder width and the shoulder height on the cross-track performance. We conclude that a shoulder height of 0.75 μm is sufficient to minimize the effect of a shoulder width of up to 1 μm. A 3D model was constructed and shows good agreement with the data. The model was used to predict throat-height tolerance and to model wider shoulder widths
Keywords :
finite element analysis; magnetic heads; magnetic recording; magnetic thin film devices; 0.75 mum; 1 mum; 3D model; ABS-patterning; NLTS; cross-track performance; disk drives; finite element model; narrow track heads; overwrite; shoulder height; shoulder width; thin film inductive heads; throat-height tolerance; track density requirements; track profile; Disk drives; Etching; Fabrication; Finite element methods; Lithography; Predictive models; Resists; Surfaces; Transistors; Writing;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/20.538683
Filename :
538683
Link To Document :
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